Entrepix Innovation Enhances Reflexion LK Prime Reliability
Entrepix, Inc., a globally recognized expert in CMP and wafer cleaning, and a subsidiary of Amtech Systems, Inc., is pleased to introduce its latest product, the LK Prime pad conditioner gimbal flexure. Designed to reduce downtime of Applied Materials Reflexion LK Prime CMP systems, this enhanced conditioner gimbal flexure reduces breakage through optimized geometry and superior materials of construction.
“This enhanced flexure delivers exceptional value and pays for itself in no time,” said Tyler Carter, Director of Sales and Marketing for Entrepix. “The OEM version of this part is known for a high failure rate due to brittle material and thin geometry. Our redesign eliminates these issues, resulting in significantly improved reliability—all without compromising the conditioning process,” added Carter.
The benefits delivered by this upgraded LK Prime pad conditioner gimbal flexure start with reduced cost and extend into multiple dimensions of reliability including reduced downtime, and reduced wafer scrap caused by unexpected failure. These benefits are compounded when factors including maintenance staffing are included.
This upgrade is part of Entrepix’ broad portfolio of 300mm Reflexion CMP system enhancements and replacement parts, which includes:
- Cost effective replacement parts
- Upgraded replacement parts and assemblies
- Support for spare parts and rebuilding of all head types including 8-zone Evo and 12-zone Horizon
- Expert tool refurbishment and harvesting capabilities
- Various motors and drivers
Additionally, Entrepix offers comprehensive service and support solutions, including field support with term-based contract options, platen coating services, and rebuild services for polish heads, pad conditioners, robots, cross hubs (3600 and 3800), load cups, upper pneumatics assemblies, and even entire tools.
By combining innovative products with extensive service offerings, Entrepix reinforces its commitment to helping customers achieve optimal performance and reliability across their CMP systems.
Reflexion and LK Prime are registered trademarks of Applied Materials. For more information about Entrepix and its products, please visit www.entrepix.com.
